@InProceedings{ Dauelsberg.Durst.Kadinski.ea:1997, author = {M. Dauelsberg and F. Durst and L. Kadinski and Y. Makarov and G. Strauch and H. J\"{u}rgensen and T. Schiekofer and M. Griebel and A. Bode and P. Luksch and M. May}, title = {{PAR-CVD}: {E}ntwicklung leistungsf\"{a}higer paralleler {B}erechnungsverfahren zur {U}ntersuchung und {O}ptimierung von {CVD}-{P}rozessen}, booktitle = {Proceedings der BMWF-Tagung HPSC97}, year = {1997}, address = {M\"{u}nchen}, note = {also as Berichte aus der Str\"omungsmechnaik, Shaker Verlag, Aachen, 1999.}, annote = {series,CVD} }